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Fast three dimensional ac electro-osmotic pumps with nonphotolithographic electrode patterning
Three dimensional (3D) stepped electrodes dramatically improve the flow rate and frequency range of ac electro-osmotic pumps, compared to planar electrodes. However, the fabrication of 3D stepped electrodes for ac electro-osmosis (ACEO) pumps usually involves several processing steps. This paper dem...
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| Auteurs principaux: | , |
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| Format: | Artigo |
| Langue: | Inglês |
| Publié: |
American Institute of Physics
2010
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| Sujets: | |
| Accès en ligne: | https://ncbi.nlm.nih.gov/pmc/articles/PMC2917787/ https://ncbi.nlm.nih.gov/pubmed/20697462 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1063/1.3463719 |
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