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Low Temperature Growth of In(2)O(3)and InN Nanocrystals on Si(111) via Chemical Vapour Deposition Based on the Sublimation of NH(4)Cl in In
Indium oxide (In(2)O(3)) nanocrystals (NCs) have been obtained via atmospheric pressure, chemical vapour deposition (APCVD) on Si(111) via the direct oxidation of In with Ar:10% O(2)at 1000 °C but also at temperatures as low as 500 °C by the sublimation of ammonium chloride (NH(4)Cl) which is incorp...
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| Autors principals: | , , , |
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| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
Springer
2009
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| Matèries: | |
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC2894321/ https://ncbi.nlm.nih.gov/pubmed/20596336 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1007/s11671-009-9266-1 |
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