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Fabrication of a Highly Sensitive Chemical Sensor Based on ZnO Nanorod Arrays

We report a novel method for fabricating a highly sensitive chemical sensor based on a ZnO nanorod array that is epitaxially grown on a Pt-coated Si substrate, with a top–top electrode configuration. To practically test the device, its O(2) and NO(2) sensing properties were investigated. The gas sen...

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Main Authors: Park, Jae Young, Choi, Sun-Woo, Kim, Sang Sub
Formato: Artigo
Idioma:Inglês
Publicado: Springer 2009
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Acceso en liña:https://ncbi.nlm.nih.gov/pmc/articles/PMC2893860/
https://ncbi.nlm.nih.gov/pubmed/20672125
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1007/s11671-009-9487-3
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