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Aluminum nitride on titanium for CMOS compatible piezoelectric transducers
Piezoelectric materials are widely used for microscale sensors and actuators but can pose material compatibility challenges. This paper reports a post-CMOS compatible fabrication process for piezoelectric sensors and actuators on silicon using only standard CMOS metals. The piezoelectric properties...
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| Main Authors: | , , , , |
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| Format: | Artigo |
| Jezik: | Inglês |
| Izdano: |
2010
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| Teme: | |
| Online dostop: | https://ncbi.nlm.nih.gov/pmc/articles/PMC2843000/ https://ncbi.nlm.nih.gov/pubmed/20333316 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1088/0960-1317/20/2/025008 |
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