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An electric impedance based microelectromechanical system flow sensor for ionic solutions
Microfluidic devices with channel cross sections measuring 4 × 10 μm(2) instrumented with gold microelectrodes were used to sense flow rates of ionic solutions on the basis of electric impedance (EI) measured perpendicular to the flow. Negative pressures were applied to access ports of the microdevi...
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| Main Authors: | , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
2003
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| Assuntos: | |
| Acceso en liña: | https://ncbi.nlm.nih.gov/pmc/articles/PMC2723957/ https://ncbi.nlm.nih.gov/pubmed/19672321 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1088/0957-0233/14/8/318 |
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