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Sputtered iridium oxide films (SIROFs) for neural stimulation electrodes
Sputtered iridium oxide films (SIROFs) deposited by DC reactive sputtering from an iridium metal target have been characterized in vitro for their potential as neural recording and stimulation electrodes. SIROFs were deposited over gold metallization on flexible multielectrode arrays fabricated on t...
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Main Authors: | , , , , , , |
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Formato: | Artigo |
Idioma: | Inglês |
Publicado em: |
2004
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Assuntos: | |
Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC2709748/ https://ncbi.nlm.nih.gov/pubmed/17271216 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1109/IEMBS.2004.1404158 |
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