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Plasma fluorination of carbon-based materials for imprint and molding lithographic applications
Diamondlike carbon nanoimprint templates are modified by exposure to a fluorocarbon-based plasma, yielding an ultrathin layer of a fluorocarbon material on the surface which has a very low surface energy with excellent antiwear properties. We demonstrate the use of these plasma fluorinated templates...
Gorde:
| Egile Nagusiak: | , , , , |
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| Formatua: | Artigo |
| Hizkuntza: | Inglês |
| Argitaratua: |
American Institute of Physics
2008
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| Gaiak: | |
| Sarrera elektronikoa: | https://ncbi.nlm.nih.gov/pmc/articles/PMC2684694/ https://ncbi.nlm.nih.gov/pubmed/19529791 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1063/1.2944997 |
| Etiketak: |
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