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Mechanism of flexural resonance frequency shift of a piezoelectric microcantilever sensor during humidity detection
We have examined the flexural resonance frequency shift of a piezoelectric microcantilever sensor (PEMS) during humidity detection and have shown that the flexural resonance frequency shift of the PEMS during detection was a result of Young’s modulus change of its piezoelectric layer. Because of the...
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| Main Authors: | , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
American Institute of Physics
2008
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC2682738/ https://ncbi.nlm.nih.gov/pubmed/19479043 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1063/1.2921050 |
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