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Microfabrication of cavities in polydimethylsiloxane using DRIE silicon molds
We present a novel method to create cavities in PDMS that is simple and exhibits wide process latitude allowing control over the radius of curvature to form shallow concave pits or deep spherical cavities.
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| Main Authors: | , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
2007
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC2587163/ https://ncbi.nlm.nih.gov/pubmed/18030383 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1039/b714742b |
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