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Plasma jet takes off.
Thanks to a series of joint research projects by Los Alamos National Laboratory, Beta Squared of Allen, Texas, and the University of California at Los Angeles, there is now a more environmentally sound method for cleaning semiconductor chips that may also be effective in cleaning up chemical, bacter...
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| Autor Principal: | |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
1999
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| Assuntos: | |
| Acceso en liña: | https://ncbi.nlm.nih.gov/pmc/articles/PMC1566477/ https://ncbi.nlm.nih.gov/pubmed/10417375 |
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