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Fabrication of aligned microstructures with a single elastomeric stamp

The fabrication of complex patterns of aligned microstructures has required the use of multiple applications of lithography. Here we describe an approach for microfabrication that encodes the two-dimensional spatial information of several photomasks onto a single elastomeric stamp by mapping each ph...

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Bibliografiska uppgifter
Huvudupphovsmän: Tien, Joe, Nelson, Celeste M., Chen, Christopher S.
Materialtyp: Artigo
Språk:Inglês
Publicerad: The National Academy of Sciences 2002
Ämnen:
Länkar:https://ncbi.nlm.nih.gov/pmc/articles/PMC122266/
https://ncbi.nlm.nih.gov/pubmed/11842197
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1073/pnas.042493399
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