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Design and Simulation of Silicon-Based Suspension Beams for Various MEMS Sensors
This paper mainly concentrates on finding maximum displacement and Eigen frequency for microelectromechanical system (MEMS) inertial sensors with various beam structures. In this work, six different shapes of beams are attached with one set of electrodes to find which structure exhibits the maximum...
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| Asıl Yazarlar: | , , |
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| Materyal Türü: | Artigo |
| Dil: | Inglês |
| Baskı/Yayın Bilgisi: |
Hindawi Limited
2022-01-01
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| Seri Bilgileri: | Advances in Materials Science and Engineering |
| Online Erişim: | http://dx.doi.org/10.1155/2022/3081473 |
| Etiketler: |
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