Cargando...
Mold Fabrication for 3D Dual Damascene Imprinting
<p>Abstract</p> <p>Previously, a damascene process based on nanoimprint lithography has been proposed (Schmid G M, et al. in J Vac Sci Technol B 24(3) 1283, 2006) to greatly reduce the fabrication steps of metal interconnection in integrated circuit. For such a process to become a...
Guardado en:
| Autores principales: | , |
|---|---|
| Formato: | Artigo |
| Lenguaje: | Inglês |
| Publicado: |
SpringerOpen
2010-01-01
|
| Colección: | Nanoscale Research Letters |
| Materias: | |
| Acceso en línea: | http://dx.doi.org/10.1007/s11671-010-9540-2 |
| Etiquetas: |
Agregar Etiqueta
Sin Etiquetas, Sea el primero en etiquetar este registro!
|