Design and Simulation of A Novel Piezoelectric AlN-Si Cantilever Gyroscope

A novel design of piezoelectric aluminum nitride (AlN)-Si composite cantilever gyroscope is proposed in this paper. The cantilever is stimulated to oscillate in plane by two inverse voltages which are applied on the two paralleled drive electrodes, respectively. The whole working principles are dedu...

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Detaylı Bibliyografya
Asıl Yazarlar: Jian Yang, Chaowei Si, Fan Yang, Guowei Han, Jin Ning, Fuhua Yang, Xiaodong Wang
Materyal Türü: Artigo
Dil:Inglês
Baskı/Yayın Bilgisi: MDPI AG 2018-02-01
Seri Bilgileri:Micromachines
Konular:
microelectromechanical systems (MEMS)
aluminum nitride
piezoelectric effect
cantilever
gyroscope
simulation
Online Erişim:http://www.mdpi.com/2072-666X/9/2/81
Etiketler: Etiketle
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