Design and Simulation of A Novel Piezoelectric AlN-Si Cantilever Gyroscope

A novel design of piezoelectric aluminum nitride (AlN)-Si composite cantilever gyroscope is proposed in this paper. The cantilever is stimulated to oscillate in plane by two inverse voltages which are applied on the two paralleled drive electrodes, respectively. The whole working principles are dedu...

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Главные авторы: Jian Yang, Chaowei Si, Fan Yang, Guowei Han, Jin Ning, Fuhua Yang, Xiaodong Wang
Формат: Artigo
Язык:Inglês
Опубликовано: MDPI AG 2018-02-01
Серии:Micromachines
Предметы:
microelectromechanical systems (MEMS)
aluminum nitride
piezoelectric effect
cantilever
gyroscope
simulation
Online-ссылка:http://www.mdpi.com/2072-666X/9/2/81
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