Femtosecond Laser Assisted 3D Etching Using Inorganic-Organic Etchant

Selective laser etching (SLE) is a technique that allows the fabrication of arbitrarily shaped glass micro-objects. In this work, we show how the capabilities of this technology can be improved in terms of selectivity and etch rate by applying an etchant solution based on a Potassium Hydroxide, wate...

Disgrifiad llawn

Wedi'i Gadw mewn:
Manylion Llyfryddiaeth
Prif Awduron: Agnė Butkutė, Greta Merkininkaitė, Tomas Jurkšas, Jokūbas Stančikas, Tomas Baravykas, Rokas Vargalis, Titas Tičkūnas, Julien Bachmann, Simas Šakirzanovas, Valdas Sirutkaitis, Linas Jonušauskas
Fformat: Artigo
Iaith:Inglês
Cyhoeddwyd: MDPI AG 2022-04-01
Cyfres:Materials
Pynciau:
selective laser etching
3D laser microfabrication
glass microprocessing
Mynediad Ar-lein:https://www.mdpi.com/1996-1944/15/8/2817
Tagiau: Ychwanegu Tag
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