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Hybrid microfabrication of 3D pyrolytic carbon electrodes by photolithography and additive manufacturing
We report a novel hybrid method for fabricating high aspect ratio 3D pyrolytic carbon electrodes combining UV photolithography and additive manufacturing with commercially available SLA 3D printers and materials. By using a 3D printed chip holder, aligned 3D printing on a patterned silicon chip was...
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| Main Authors: | , , , , |
|---|---|
| 格式: | Artigo |
| 語言: | Inglês |
| 出版: |
Elsevier
2022-06-01
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| 叢編: | Micro and Nano Engineering |
| 主題: | |
| 在線閱讀: | http://www.sciencedirect.com/science/article/pii/S2590007222000211 |
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