Hybrid microfabrication of 3D pyrolytic carbon electrodes by photolithography and additive manufacturing

We report a novel hybrid method for fabricating high aspect ratio 3D pyrolytic carbon electrodes combining UV photolithography and additive manufacturing with commercially available SLA 3D printers and materials. By using a 3D printed chip holder, aligned 3D printing on a patterned silicon chip was...

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Detalles Bibliográficos
Main Authors: Jesper Y. Pan, Babak Rezaei, Thomas A. Anhøj, Niels B. Larsen, Stephan S. Keller
Formato: Artigo
Idioma:Inglês
Publicado: Elsevier 2022-06-01
Series:Micro and Nano Engineering
Assuntos:
Additive manufacturing
CMEMS
Pyrolytic carbon
SU-8
Acceso en liña:http://www.sciencedirect.com/science/article/pii/S2590007222000211
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