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Structure Design and Stepping Characteristics Analysis of the Biaxial Piezoelectric Actuated Stage Using a Thin-Disc Piezoelectric Actuator
In this paper, a novel thin-disc piezoelectric actuator, 4-9-9-14 piezoelectric actuator, is used to construct and drive the micro/nanometer level biaxial piezoelectric actuated stage. The 4-9-9-14 piezoelectric actuator offers a better balanced capability of forward rotation and reverse rotation th...
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Autor principal: | |
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Formato: | Artigo |
Idioma: | Inglês |
Publicado em: |
SAGE Publishing
2014-02-01
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Colecção: | Advances in Mechanical Engineering |
Acesso em linha: | https://doi.org/10.1155/2014/121497 |
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