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Structure Design and Stepping Characteristics Analysis of the Biaxial Piezoelectric Actuated Stage Using a Thin-Disc Piezoelectric Actuator

In this paper, a novel thin-disc piezoelectric actuator, 4-9-9-14 piezoelectric actuator, is used to construct and drive the micro/nanometer level biaxial piezoelectric actuated stage. The 4-9-9-14 piezoelectric actuator offers a better balanced capability of forward rotation and reverse rotation th...

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Autor principal: Shann-Chyi Mou
Formato: Artigo
Idioma:Inglês
Publicado em: SAGE Publishing 2014-02-01
Colecção:Advances in Mechanical Engineering
Acesso em linha:https://doi.org/10.1155/2014/121497
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