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Fabrication of High Sensitivity Carbon Microcoil Pressure Sensors
This work demonstrates a highly sensitive pressure sensor that was fabricated using carbon microcoils (CMCs) and polydimethylsiloxane (PDMS). CMCs were grown by chemical vapor deposition using various ratios of Fe-Sn catalytic solution. The pressure sensor has a sandwiched structure, in which the as...
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| Main Authors: | , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI AG
2012-07-01
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| Colecção: | Sensors |
| Assuntos: | |
| Acesso em linha: | http://www.mdpi.com/1424-8220/12/8/10034 |
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