TRAJECTORY CONTROL OF COORDINATE SYSTEMS OF SUBMICRON MICROELECTRONICS EQUIPMENT

Measuring tools used for the forming of programming motions in the assembly and opto-mechanical equipment of microelectronics were analyzed. The structure of the trajectory control system based on approach of hardware-in-the-loop modeling and real-time verification was proposed. The results of using...

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Bibliographic Details
Main Authors: I. V. Dainiak, V. V. Jarski, S. E. Karpovich
Format: Artigo
Language:Russo
Published: Educational institution «Belarusian State University of Informatics and Radioelectronics» 2019-06-01
Series:Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki
Subjects:
координатная система
система траекторного управления
прецизионное оборудование
микроэлектроника
Online Access:https://doklady.bsuir.by/jour/article/view/187
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