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TRAJECTORY CONTROL OF COORDINATE SYSTEMS OF SUBMICRON MICROELECTRONICS EQUIPMENT
Measuring tools used for the forming of programming motions in the assembly and opto-mechanical equipment of microelectronics were analyzed. The structure of the trajectory control system based on approach of hardware-in-the-loop modeling and real-time verification was proposed. The results of using...
Αποθηκεύτηκε σε:
| Κύριοι συγγραφείς: | , , |
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| Μορφή: | Artigo |
| Γλώσσα: | Russo |
| Έκδοση: |
Educational institution «Belarusian State University of Informatics and Radioelectronics»
2019-06-01
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| Σειρά: | Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki |
| Θέματα: | |
| Διαθέσιμο Online: | https://doklady.bsuir.by/jour/article/view/187 |
| Ετικέτες: |
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