Načítá se...
TRAJECTORY CONTROL OF COORDINATE SYSTEMS OF SUBMICRON MICROELECTRONICS EQUIPMENT
Measuring tools used for the forming of programming motions in the assembly and opto-mechanical equipment of microelectronics were analyzed. The structure of the trajectory control system based on approach of hardware-in-the-loop modeling and real-time verification was proposed. The results of using...
Uloženo v:
| Hlavní autoři: | , , |
|---|---|
| Médium: | Artigo |
| Jazyk: | Russo |
| Vydáno: |
Educational institution «Belarusian State University of Informatics and Radioelectronics»
2019-06-01
|
| Edice: | Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki |
| Témata: | |
| On-line přístup: | https://doklady.bsuir.by/jour/article/view/187 |
| Tagy: |
Přidat tag
Žádné tagy, Buďte první, kdo otaguje tento záznam!
|