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Effects of Growth Conditions on Structural Properties of ZnO Nanostructures on Sapphire Substrate by Metal–Organic Chemical Vapor Deposition
<p>Abstract</p> <p>ZnO was grown on sapphire substrate by metal–organic chemical vapor deposition using the diethylzinc (DEZn) and oxygen (O<sub>2</sub>) as source chemicals at 500 °C. Influences of the chamber pressure and O<sub>2</sub>/D...
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Main Authors: | , , , , |
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Formato: | Artigo |
Idioma: | Inglês |
Publicado em: |
SpringerOpen
2009-01-01
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Colecção: | Nanoscale Research Letters |
Assuntos: | |
Acesso em linha: | http://dx.doi.org/10.1007/s11671-009-9257-2 |
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