Surface sintering of tungsten powder targets designed by electromagnetic discharge: A novel approach for film synthesis in magnetron sputtering

A three-dimensional (3D) sintering method of bulk magnetron targets has been developed recently. However, the use of bulk target had the following limitations: constrained geometry, limited chemical-phase composition, small size and cost-effectiveness. Thus a novel approach of surface sintering (2D)...

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Autori principali: B. Wicher, K. Zdunek, R. Chodun, S. Haj Ibrahim, M. Kubiś, A. Lachowski, K. Król, J. Jaroszewicz, R. Minikayev, K. Nowakowska-Langier
Natura: Artigo
Lingua:Inglês
Pubblicazione: Elsevier 2020-06-01
Serie:Materials & Design
Soggetti:
Surface sintering
Thermal diffusivity
Powder targets
Tungsten thin film synthesis
Metastable β-W phase nucleation
Electrical resistivity
Accesso online:http://www.sciencedirect.com/science/article/pii/S0264127520301684
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