Effect of PyC Inner Coating on Preparation of 3C-SiC Coating on Quartz Glass by Chemical Vapor Reaction

The cubic polycrystal of SiC (3C-SiC) coating on the quartz glass (QG) surface was successfully prepared via a two-step chemical vapor deposition (CVD) by introducing a thin PyC coating as a buffer layer. Through combining the intake system of CVD PyC and CVD SiC, the SiC/PyC composite coating can b...

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Main Authors: Jian Wu, Shengteng Qian, Tongguo Huo, Jianxin Zheng, Pinlong Zhang, Yu Dai, Dongsheng Geng
Formato: Artigo
Idioma:Inglês
Publicado em: Frontiers Media S.A. 2022-05-01
Colecção:Frontiers in Materials
Assuntos:
SiC coating
pyc coating
quartz glass
chemical vapor deposition
anti-acid corrosion
Acesso em linha:https://www.frontiersin.org/articles/10.3389/fmats.2022.897900/full
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