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Investigation of machining mechanism of monocrystalline silicon in nanometric grinding

Monocrystalline silicon is the foundation of the computer industry, so it has a great significance to study the ultra-high precision machining of silicon. Molecular dynamics has been proved as a very effective method for the study of ultra-precision machining in nanoscale. During the grinding of bri...

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Bibliografische gegevens
Hoofdauteurs: Liping He, Fulong Zhu, Yuhong Liu, Sheng Liu
Formaat: Artigo
Taal:Inglês
Gepubliceerd in: AIP Publishing LLC 2017-05-01
Reeks:AIP Advances
Online toegang:http://dx.doi.org/10.1063/1.4983216
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