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Machine Learning Approaches for Fault Detection in Semiconductor Manufacturing Process: A Critical Review of Recent Applications and Future Perspectives
In modern industries, early fault detection is crucial for maintaining process safety and product quality. Process data contains information on the entire plant acting as a map for visualization of relationships between various plant units, making data-driven process monitoring a key technology for...
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| Main Authors: | , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Croatian Society of Chemical Engineers
2022-04-01
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| Colecção: | Chemical and Biochemical Engineering Quarterly |
| Assuntos: | |
| Acesso em linha: | http://silverstripe.fkit.hr/cabeq/assets/Uploads/01-1-2022.pdf |
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