Pulsed Sputtering Preparation of InGaN Multi-Color Cascaded LED Stacks for Large-Area Monolithic Integration of RGB LED Pixels

Micro-LEDs have been attracting attention as a potential candidate for the next generation of display technology. Here we demonstrate the feasibility of large-area monolithic integration of multi-color InGaN micro-LEDs via pulsed sputtering deposition (PSD) and a standard photolithographical techniq...

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Main Authors: Soichiro Morikawa, Kohei Ueno, Atsushi Kobayashi, Hiroshi Fujioka
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI AG 2022-04-01
Colecção:Crystals
Assuntos:
InGaN
LED
sputtering
tunneling junction
Acesso em linha:https://www.mdpi.com/2073-4352/12/4/499
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