Generalized method of computer-aided design of technological processes for MEMS accelerometers manufacturing

A generalized method for the automated design of technological processes for the production of MEMS accelerometers is developed. This method is based on two methods: the method of selecting a standard technological processes and the method of searching for analogues of individual subsystems and elem...

ver descrição completa

Na minha lista:
Detalhes bibliográficos
Principais autores: I. Sh. Nevliudov, K. L. Khrustalev, V. O. Bortnikova
Formato: Artigo
Idioma:Russo
Publicado em: Educational institution «Belarusian State University of Informatics and Radioelectronics» 2019-06-01
coleção:Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki
Assuntos:
accelerometer
mems
technological process
method
computer-aided design
Acesso em linha:https://doklady.bsuir.by/jour/article/view/988
Tags: Adicionar Tag
Sem tags, seja o primeiro a adicionar uma tag!

Registros relacionados