Generalized method of computer-aided design of technological processes for MEMS accelerometers manufacturing

A generalized method for the automated design of technological processes for the production of MEMS accelerometers is developed. This method is based on two methods: the method of selecting a standard technological processes and the method of searching for analogues of individual subsystems and elem...

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Main Authors: I. Sh. Nevliudov, K. L. Khrustalev, V. O. Bortnikova
Formáid: Artigo
Teanga:Russo
Foilsithe: Educational institution «Belarusian State University of Informatics and Radioelectronics» 2019-06-01
Sraith:Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki
Ábhair:
accelerometer
mems
technological process
method
computer-aided design
Rochtain Ar Líne:https://doklady.bsuir.by/jour/article/view/988
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