Atmospheric Pressure Microwave Plasma Jet for Organic Thin Film Deposition

In this work, the potential of a microwave (MW)-induced atmospheric pressure plasma jet (APPJ) in film deposition of styrene and methyl methacrylate (MMA) precursors is investigated. Plasma properties during the deposition and resultant coating characteristics are studied. Optical emission spectrosc...

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Bibliografiska uppgifter
Huvudupphovsmän: Mehrnoush Narimisa, František Krčma, Yuliia Onyshchenko, Zdenka Kozáková, Rino Morent, Nathalie De Geyter
Materialtyp: Artigo
Språk:Inglês
Publicerad: MDPI AG 2020-02-01
Serie:Polymers
Ämnen:
atmospheric pressure plasma jet (appj)
microwave (mw) discharge
thin film deposition
optical emission spectroscopy (oes)
comsol multiphysics
methyl methacrylate (mma)
styrene
Länkar:https://www.mdpi.com/2073-4360/12/2/354
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