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Effects of Embedded Helium on the Microstructure and Mechanical Properties of Erbium Films
A series of helium (He) charged nanograin-sized erbium (Er) films were deposited by direct current (DC)-magnetron sputtering with different He/Ar mixture gases. The microstructure and mechanical properties of He-charged Er films were investigated by X-ray diffraction (XRD), transmission electron mic...
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| Main Authors: | , , , , |
|---|---|
| 格式: | Artigo |
| 語言: | Inglês |
| 出版: |
MDPI AG
2019-11-01
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| 叢編: | Nanomaterials |
| 主題: | |
| 在線閱讀: | https://www.mdpi.com/2079-4991/9/11/1564 |
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