Effects of Embedded Helium on the Microstructure and Mechanical Properties of Erbium Films

A series of helium (He) charged nanograin-sized erbium (Er) films were deposited by direct current (DC)-magnetron sputtering with different He/Ar mixture gases. The microstructure and mechanical properties of He-charged Er films were investigated by X-ray diffraction (XRD), transmission electron mic...

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Bibliographische Detailangaben
Hauptverfasser: Wenbo Fu, Huahai Shen, Liqun Shi, Xiaosong Zhou, Xinggui Long
Format: Artigo
Sprache:Inglês
Veröffentlicht: MDPI AG 2019-11-01
Schriftenreihe:Nanomaterials
Schlagworte:
helium bubbles
sputtering
erbium film
mechanical properties
tem
Online Zugang:https://www.mdpi.com/2079-4991/9/11/1564
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