High-current density terahertz resonant runneling diodes grown by MOCVD

AlAs/InGaAs/AlAs resonant tunneling materials was optimized, and terahertz resonant tunneling diodes grown by MOCVD is first fabricated. The epitaxial layers of the RTD were grown on semi-insulating InP substrate. InP-based RTD were fabricated by using contact lithography and air bridge technology.T...

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Bibliographic Details
Main Authors: Che Xianghui, Liang Shixiong, Zhang Lisen, Gu Guodong, Hao Wenjia, Yang Dabao, Chen Hongtai, Feng Zhihong
Format: Artigo
Language:Chinês
Published: National Computer System Engineering Research Institute of China 2019-08-01
Series:Dianzi Jishu Yingyong
Subjects:
resonant tunneling diodes
peak current density
peak to valley current ratio
Online Access:http://www.chinaaet.com/article/3000107044
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