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Graph neural networks for parameter estimation in micro-electro-mechanical system testing

Micro-electro-mechanical systems (MEMS) are of great importance in a broad range of applications including vehicle safety and consumer electronics. During the testing of these devices, large heterogeneous data sets containing a variety of parameters are recorded. Aiming to substitute costly measurem...

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Bibliographic Details
Main Authors: Monika Elisabeth Heringhaus, Alexander Buhmann, Jürgen Müller, André Zimmermann
Format: Artigo
Language:Inglês
Published: Elsevier 2022-07-01
Series:Array
Subjects:
MEMS
MEMS testing
Graph neural network
Graph representation
Online Access:http://www.sciencedirect.com/science/article/pii/S259000562200025X
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