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Investigation into Mass Loading Sensitivity of Sezawa Wave Mode-Based Surface Acoustic Wave Sensors
In this work mass loading sensitivity of a Sezawa wave mode based surface acoustic wave (SAW) device is investigated through finite element method (FEM) simulation and the prospects of these devices to function as highly sensitive SAW sensors is reported. A ZnO/Si layered SAW resonator is considered...
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| 主要な著者: | , , , , |
|---|---|
| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
MDPI AG
2013-02-01
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| シリーズ: | Sensors |
| 主題: | |
| オンライン･アクセス: | http://www.mdpi.com/1424-8220/13/2/2164 |
| タグ: |
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