Investigation into Mass Loading Sensitivity of Sezawa Wave Mode-Based Surface Acoustic Wave Sensors

In this work mass loading sensitivity of a Sezawa wave mode based surface acoustic wave (SAW) device is investigated through finite element method (FEM) simulation and the prospects of these devices to function as highly sensitive SAW sensors is reported. A ZnO/Si layered SAW resonator is considered...

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Bibliographische Detailangaben
Hauptverfasser: N. Ramakrishnan, R. Parthiban, Sawal Hamid Md Ali, Md Shabiul Islam, Ajay Achath Mohanan
Format: Artigo
Sprache:Inglês
Veröffentlicht: MDPI AG 2013-02-01
Schriftenreihe:Sensors
Schlagworte:
surface acoustic wave devices
Sezawa wave mode
mass loading effect
sensors
FEM simulation
Online Zugang:http://www.mdpi.com/1424-8220/13/2/2164
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