Investigation into Mass Loading Sensitivity of Sezawa Wave Mode-Based Surface Acoustic Wave Sensors

In this work mass loading sensitivity of a Sezawa wave mode based surface acoustic wave (SAW) device is investigated through finite element method (FEM) simulation and the prospects of these devices to function as highly sensitive SAW sensors is reported. A ZnO/Si layered SAW resonator is considered...

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Bibliografiske detaljer
Main Authors: N. Ramakrishnan, R. Parthiban, Sawal Hamid Md Ali, Md Shabiul Islam, Ajay Achath Mohanan
Format: Artigo
Sprog:Inglês
Udgivet: MDPI AG 2013-02-01
Serier:Sensors
Fag:
surface acoustic wave devices
Sezawa wave mode
mass loading effect
sensors
FEM simulation
Online adgang:http://www.mdpi.com/1424-8220/13/2/2164
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