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The Fabrication and Application of a PDMS Micro Through-Holes Mask in Electrochemical Micromanufacturing
The electrochemical micromanufacturing process, as a key micromanufacturing technology, plays an important role in diverse industries. In this paper, polydimethylsiloxane (PDMS) is employed as a mask in the electrochemical micromanufacture of microstructures because of its chemical resistance, low c...
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| Main Authors: | , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
SAGE Publishing
2014-08-01
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| Colecção: | Advances in Mechanical Engineering |
| Acesso em linha: | https://doi.org/10.1155/2014/943092 |
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