Multilayer Soft Photolithography Fabrication of Microfluidic Devices Using a Custom-Built Wafer-Scale PDMS Slab Aligner and Cost-Efficient Equipment

We present a robust, low-cost fabrication method for implementation in multilayer soft photolithography to create a PDMS microfluidic chip with features possessing multiple height levels. This fabrication method requires neither a cleanroom facility nor an expensive UV exposure machine. The central...

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Egile Nagusiak:	Trieu Nguyen, Tanoy Sarkar, Tuan Tran, Sakib M. Moinuddin, Dipongkor Saha, Fakhrul Ahsan
Formatua:	Artigo
Hizkuntza:	Inglês
Argitaratua:	MDPI AG 2022-08-01
Saila:	Micromachines
Gaiak:	aligner PDMS microfluidics photomask photolithography multiplayer
Sarrera elektronikoa:	https://www.mdpi.com/2072-666X/13/8/1357
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