One Method for Improving Overlay Accuracy Through Focus Control
Image-Based Overlay (IBO) equipment leverages optical reflection imaging principles, combined with focusing and alignment strategies to measure overlay marks. Among all measurement steps, the focal plane measurement of marks exerts the most critical impact on overlay accuracy, while the time consume...
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| Hauptverfasser: | , , |
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| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
MDPI AG
2026-02-01
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| Schriftenreihe: | Micromachines |
| Schlagworte: | |
| Online-Zugang: | https://www.mdpi.com/2072-666X/17/2/207 |
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