Influence of Nanoscale Layers of the Mn3(P0.1V0.9O4)2 Chemostimulator-Modifi er on the Process of Thermal Oxidation of GaAs, its Composition, and Morphology of the Resulting Films
Chemostimulated thermal oxidation is one of the approaches to the formation of functional nanoscale fi lms on an AIIIBV surface. In order to obtain the desired result, it is necessary to reasonably choose an object that can act as a chemostimulator of the process or a modifi er of the structure and...
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| Principais autores: | , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Voronezh State University
2020-03-01
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| coleção: | Конденсированные среды и межфазные границы |
| Assuntos: | |
| Acesso em linha: | https://journals.vsu.ru/kcmf/article/view/2535 |
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