Surrogate model for optimizing annealing duration of self-assembled membrane-cavity structures
Abstract We propose a scheme to establish a surrogate model for optimizing the annealing duration of the self-assembled membrane-cavity structures from hole patterned silicon wafers. Although it has been reported that the design space of post-annealing shape can be extended by increasing the dimensi...
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| Principais autores: | , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
SpringerOpen
2022-06-01
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| coleção: | Micro and Nano Systems Letters |
| Assuntos: | |
| Acesso em linha: | https://doi.org/10.1186/s40486-022-00148-5 |
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