Pillar Growth by Focused Electron Beam-Induced Deposition Using a Bimetallic Precursor as Model System: High-Energy Fragmentation vs. Low-Energy Decomposition

Electron-induced fragmentation of the HFeCo₃(CO)₁₂ precursor allows direct-write fabrication of 3D nanostructures with metallic contents of up to >95 at %. While microstructure and composition determine the physical and functional properties of focused electron beam-induced dep...

Täydet tiedot

Bibliografiset tiedot

Päätekijät:	Robert Winkler, Michele Brugger-Hatzl, Fabrizio Porrati, David Kuhness, Thomas Mairhofer, Lukas M. Seewald, Gerald Kothleitner, Michael Huth, Harald Plank, Sven Barth
Aineistotyyppi:	Artigo
Kieli:	Inglês
Julkaistu:	MDPI AG 2023-11-01
Sarja:	Nanomaterials
Aiheet:	additive direct-write manufacturing 3D nano printing focused electron beam-induced deposition nanomagnetic magnetic force microscopy chemical composition
Linkit:	https://www.mdpi.com/2079-4991/13/21/2907
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