Modeling and random search optimization for the polysilicon CVD reactor
Polysilicon is mainly obtained by the Siemens process chemical vapor deposition (CVD) reaction, in which hydrogen gas and trichlorosilane (TCS) are fed into the CVD reactor to produce polysilicon. However, adjusting the feeding parameters in a step-by-step manner according to the actual deposition r...
Tallennettuna:
| Päätekijät: | , , , , , , , |
|---|---|
| Aineistotyyppi: | Artigo |
| Kieli: | Inglês |
| Julkaistu: |
Elsevier
2023-12-01
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| Sarja: | Results in Control and Optimization |
| Aiheet: | |
| Linkit: | http://www.sciencedirect.com/science/article/pii/S2666720723001224 |
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