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Optical Fiber Probe Microcantilever Sensor Based on Fabry–Perot Interferometer

Optical fiber Fabry–Perot sensors have long been the focus of researchers in sensing applications because of their unique advantages, including highly effective, simple light path, low cost, compact size, and easy fabrication. Microcantilever-based devices have been extensively explored in chemical...

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Principais autores: Yongzhang Chen, Yiwen Zheng, Haibing Xiao, Dezhi Liang, Yufeng Zhang, Yongqin Yu, Chenlin Du, Shuangchen Ruan
Format: Artigo
Sprog:Inglês
Udgivet: MDPI AG 2022-08-01
Serier:Sensors
Fag:
fiber probe sensor
microcantilever
micromachining
Fabry–Perot cavity
Online adgang:https://www.mdpi.com/1424-8220/22/15/5748
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