High-Efficiency Output Pressure Performance Using Capacitive Micromachined Ultrasonic Transducers with Substrate-Embedded Springs

Capacitive micromachined ultrasonic transducers (CMUTs) with substrate-embedded springs offer highly efficient output pressure performance over conventional CMUTs, owing to their nonflexural parallel plate movement. The embedded silicon springs support thick Si piston plates, creating a large nonfle...

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Principais autores:	Byung Chul Lee, Amin Nikoozadeh, Kwan Kyu Park, Butrus T. Khuri-Yakub
Formato:	Artigo
Idioma:	Inglês
Publicado em:	MDPI AG 2018-08-01
coleção:	Sensors
Assuntos:	capacitive micromachined ultrasonic transducers (CMUTs) substrate-embedded springs nonflexural piston movement high-efficiency output pressure
Acesso em linha:	http://www.mdpi.com/1424-8220/18/8/2520
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