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Extended-Aperture Shape Measurements Using Spatially Partially Coherent Illumination (ExASPICE)

We have recently demonstrated that the 3D shape of micro-parts can be measured using LED illumination based on speckle contrast evaluation in the recently developed SPICE profilometry (shape measurements based on imaging with spatially partially coherent illumination). The main advantage of SPICE is...

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Principais autores: Mostafa Agour, Claas Falldorf, Ralf B. Bergmann
Format: Artigo
Sprog:Inglês
Udgivet: MDPI AG 2024-05-01
Serier:Sensors
Fag:
optical metrology
shape measurements
partially coherent illumination
depth discrimination
Online adgang:https://www.mdpi.com/1424-8220/24/10/3072
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