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Tackling the Challenging Determination of Trace Elements in Ultrapure Silicon Carbide by LA-ICP-MS

The goal of accurately quantifying trace elements in ultrapure silicon carbide (SiC) with a purity target of 5N (99.999% purity) was addressed. The unsuitability of microwave-assisted acid digestion followed by Inductively Coupled Plasma Mass Spectrometry (ICP-MS) analysis was proved to depend mainl...

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Autori principali: Davide Spanu, Alessandro Palestra, Veronica Prina, Damiano Monticelli, Simone Bonanomi, Sandro Usseglio Nanot, Gilberto Binda, Laura Rampazzi, Gianluca Sessa, David Callejo Munoz, Sandro Recchia
Natura: Artigo
Lingua:Inglês
Pubblicazione: MDPI AG 2023-03-01
Serie:Molecules
Soggetti:
silicon carbide
laser ablation
ICP-MS
microwave-assisted acid digestion
trace elements
LA-ICP-MS
Accesso online:https://www.mdpi.com/1420-3049/28/6/2845
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